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| Ion implanter - HV terminal 500 kV | 2MV Ван де Графов јонски акцелератор | UHV chamber for thin film deposition e-beam or thermal evaporation | ||||
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| Thin film coating unit for SEM sample preparation - Dual ion miller for TEM specimen preparation | TEM - Philips EM400 | TEM - Philips EM400T | ||||
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SEM - Philips EM500 |
SEM - JEOL 25N with EPMA (e-microprobe) |
ANA - HV thin film deposition unit with dual ion beams | ||||
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| EMA 10 - UHV system
Surface analysis LEIS i SIMS |
Balzers SPUTTRON II thin film deposition system | Balzers BAK 550 evaporation system | ||||
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| Talistep - thin film thickness and surface roughness measurements | Трофазни Теслин трансформатор | VEECO MultiMode Quadrex SPM | ||||
